The elekitironi mtengo evaporation njira ndi mtundu wa vakuyumu evaporation ❖ kuyanika, amene amagwiritsa ntchito matabwa elekitironi kutentha mwachindunji zinthu evaporation pansi zingalowe mu mikhalidwe vacuum, nthunzi zinthu evaporation ndi kuzitengera ku gawo lapansi, ndi condense pa gawo lapansi kupanga filimu woonda. Mu chipangizo chotenthetsera cha electron mtengo, chinthu chowotcha chimayikidwa mu crucible madzi utakhazikika, zomwe zingapewe zomwe zimachitika pakati pa evaporation zinthu ndi khoma crucible ndi kukhudza khalidwe la filimuyo. Ma crucibles angapo amatha kuyikidwa mu chipangizocho kuti akwaniritse kutentha kwanthawi imodzi kapena kosiyana ndikuyika zinthu zosiyanasiyana. Ndi evaporation ya ma elekitironi, chinthu chilichonse chimatha kukhala nthunzi.
Kutentha kwa ma elekitironi kumatha kupangitsa kuti zinthu zisungunuke kwambiri. Poyerekeza ndi kutentha kwapang'onopang'ono kutentha kwa mpweya, kumakhala ndi kutentha kwapamwamba kwambiri, kachulukidwe kakang'ono ka mtengo wamakono, komanso kuthamanga kwa evaporation. Mafilimu ndi filimu ya zinthu zosiyanasiyana kuwala monga galasi conductive.
Maonekedwe a electron mtengo evaporation ndi chakuti sichidzaphimba mbali ziwiri za chandamale cha mbali zitatu, ndipo nthawi zambiri zimangoyika pamtunda. Uku ndiye kusiyana pakati pa electron mtengo evaporation ndi sputtering.
Electron beam evaporation imagwiritsidwa ntchito kwambiri pofufuza za semiconductor ndi mafakitale. Mphamvu ya ma elekitironi yothamanga kwambiri imagwiritsidwa ntchito kugunda chandamale, zomwe zimachititsa kuti zinthuzo zisungunuke ndikuwuka. Potsirizira pake anaika pa chandamale.
Nthawi yotumiza: Dec-02-2022